Granted Patent
Utility
US 6,682,607 · App. 10/092,215
Reconditioning of semiconductor substrates to remove photoresist during semiconductor device fabrication
Inventor:
Anthony J. Farino
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Mar 5, 2002
Inventor
Anthony J. Farino
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.