Granted Patent
Utility
US 6,682,971 · App. 09/820,194
Method of manufacturing a semiconductor
Inventors:
Masayuki Tsuneda, Hideharu Itatani
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Mar 29, 2001
Inventors
Masayuki Tsuneda
Hideharu Itatani
Assignees (at issue)
Hitachi Kokusai Electric Inc.
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.