IP Library Granted Patent US 6,682,984
Granted Patent Utility
US 6,682,984 · App. 09/535,483

Method of making a concave capacitor

Inventors: Zhiqiang Wu, Kunal R. Parekh, Li Li
Patented Case View Patent ↗
Granted: Jan 27, 2004 Filed: Mar 24, 2000
Inventors
Zhiqiang Wu
Kunal R. Parekh
Li Li
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,682,984
App. No.
09/535,483
Filed
2000-03-24
Granted
2004-01-27
Kind
B1