Granted Patent
Utility
US 6,683,312 · App. 09/749,679
Ultraviolet cleaning apparatus of a substrate and the method thereof
Inventor:
Heon-Do Yun
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: Dec 28, 2000
Inventor
Heon-Do Yun
Assignee (at issue)
LG Philips LCD Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.