Granted Patent
Utility
US 6,683,320 · App. 09/859,295
Through-the-lens neutralization for charged particle beam system
Inventors:
Robert L. Gerlach, Mark W. Utlaut
Patented Case
View Patent ↗
Granted: Jan 27, 2004
Filed: May 16, 2001
Inventors
Robert L. Gerlach
Mark W. Utlaut
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.