Granted Patent
Utility
US 6,685,540 · App. 09/995,025
Polishing pad comprising particles with a solid core and polymeric shell
Inventors:
Isaac K. Cherian, Sriram Anjur, Steven Grumbine
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Nov 27, 2001
Inventors
Isaac K. Cherian
Sriram Anjur
Steven Grumbine
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.