Granted Patent
Utility
US 6,685,844 · App. 09/782,393
Deep reactive ion etching process and microelectromechanical devices formed thereby
Inventors:
David B. Rich, John C. Christenson
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Feb 14, 2001
Inventors
David B. Rich
John C. Christenson
Assignee (at issue)
Delphi Technologies
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.