Granted Patent
Utility
US 6,686,098 · App. 09/729,062
Lithography method and lithography mask
Inventors:
Gunther Czech, Christoph Friedrich, Carsten Fülber, Rainer Käsmaier, Dietrich Widmann
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Dec 4, 2000
Inventors
Gunther Czech
Christoph Friedrich
Carsten Fülber
Rainer Käsmaier
Dietrich Widmann
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.