IP Library Granted Patent US 6,686,121
Granted Patent Utility
US 6,686,121 · App. 09/824,198

Process for preparing resists

Inventors: Hiroshi Okazaki, Georg Pawlowski, Satoru Funato, Yoshiaki Kinoshita, Yuko Yamaguchi
Patented Case View Patent ↗
Granted: Feb 3, 2004 Filed: Apr 2, 2001
Inventors
Hiroshi Okazaki
Georg Pawlowski
Satoru Funato
Yoshiaki Kinoshita
Yuko Yamaguchi
Assignee (at issue)
Clariant Finance (BVI) Limited

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Quick Facts
Patent No.
US 6,686,121
App. No.
09/824,198
Filed
2001-04-02
Granted
2004-02-03
Kind
B2