Granted Patent
Utility
US 6,686,595 · App. 10/183,768
Electron impact ion source
Inventor:
Thomas N. Horsky
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Jun 26, 2002
Inventor
Thomas N. Horsky
Assignee (at issue)
SemEquip, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.