Granted Patent
Utility
US 6,686,639 · App. 10/260,662
High performance MEMS device fabricatable with high yield
Inventor:
Chialun Tsai
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Sep 30, 2002
Inventor
Chialun Tsai
Assignee (at issue)
Innovative Technology Licensing LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.