Granted Patent
Utility
US 6,687,014 · App. 10/050,737
Method for monitoring the rate of etching of a semiconductor
Inventors:
Shoaib Zaidi, Gangadhara S. Mathad
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Jan 16, 2002
Inventors
Shoaib Zaidi
Gangadhara S. Mathad
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.