Granted Patent
Utility
US 6,689,682 · App. 09/924,670
Multilayer anti-reflective coating for semiconductor lithography
Inventors:
Robert B. Ogle, Tuan Pham, Marina V. Plat
Patented Case
View Patent ↗
Granted: Feb 10, 2004
Filed: Aug 7, 2001
Inventors
Robert B. Ogle
Tuan Pham
Marina V. Plat
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.