Granted Patent
Utility
US 6,689,692 · App. 08/994,894
Composition for oxide CMP
Inventors:
Gautam S. Grover, Brian L. Mueller, Shumin Wang
Patented Case
View Patent ↗
Granted: Feb 10, 2004
Filed: Dec 19, 1997
Inventors
Gautam S. Grover
Brian L. Mueller
Shumin Wang
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.