Granted Patent
Utility
US 6,691,068 · App. 09/643,614
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
Inventors:
Mason L. Freed, Randall S. Mundt, Costas J. Spanos
Patented Case
View Patent ↗
Granted: Feb 10, 2004
Filed: Aug 22, 2000
Inventors
Mason L. Freed
Randall S. Mundt
Costas J. Spanos
Assignee (at issue)
OnWafer Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.