Granted Patent
Utility
US 6,692,546 · App. 09/932,415
Chemical mechanical polishing compositions for metal and associated materials and method of using same
Inventors:
Ying Ma, William A. Wojtczak, Cary Regulski, Thomas H. Baum, David Bernhard, Deepak Verma
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: Aug 17, 2001
Inventors
Ying Ma
William A. Wojtczak
Cary Regulski
Thomas H. Baum
David Bernhard
Deepak Verma
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.