Granted Patent
Utility
US 6,692,875 · App. 09/839,764
Mask for optical projection systems, and a process for its production
Inventors:
Werner Fischer, Fritz Gans, Rainer Pforr, Jorg Thiele
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: Apr 20, 2001
Inventors
Werner Fischer
Fritz Gans
Rainer Pforr
Jorg Thiele
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.