Granted Patent
Utility
US 6,693,033 · App. 09/983,854
Method of removing an amorphous oxide from a monocrystalline surface
Inventors:
John Edwards, Yi Wei, Dirk Jordan, Xiaoming Hu, James Craigo, Ravindranath Droopad, Zhiyi Yu, Alexander A. Demkov
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: Oct 26, 2001
Inventors
John Edwards
Yi Wei
Dirk Jordan
Xiaoming Hu
James Craigo
Ravindranath Droopad
Zhiyi Yu
Alexander A. Demkov
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.