IP Library Granted Patent US 6,693,040
Granted Patent Utility
US 6,693,040 · App. 10/119,809

Method for cleaning the contact area of a metal line

Inventor: Dong Joon Kim
Patented Case View Patent ↗
Granted: Feb 17, 2004 Filed: Apr 11, 2002
Inventor
Dong Joon Kim
Assignee (at issue)
SK hynix Inc.

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Quick Facts
Patent No.
US 6,693,040
App. No.
10/119,809
Filed
2002-04-11
Granted
2004-02-17
Kind
B2