Granted Patent
Utility
US 6,693,320 · App. 09/385,786
Capacitor structures with recessed hemispherical grain silicon
Inventors:
Scott DeBoer, Whonchee Lee
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: Aug 30, 1999
Inventors
Scott DeBoer
Whonchee Lee
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.