Granted Patent
Utility
US 6,693,355 · App. 10/445,561
Method of manufacturing a semiconductor device with an air gap formed using a photosensitive material
Inventor:
Nicole R. Grove
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: May 27, 2003
Inventor
Nicole R. Grove
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.