Granted Patent
Utility
US 6,693,664 · App. 10/319,716
Method and system for fast on-line electro-optical detection of wafer defects
Inventor:
Gad Neumann
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: Dec 16, 2002
Inventor
Gad Neumann
Assignee (at issue)
Negevtech, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.