IP Library Granted Patent US 6,693,701
Granted Patent Utility
US 6,693,701 · App. 09/867,036

Method and apparatus for diffractive transfer of a mask grating

Inventor: Poul Erik Hansen
Patented Case View Patent ↗
Granted: Feb 17, 2004 Filed: May 29, 2001
Inventor
Poul Erik Hansen
Assignee (at issue)
Ibsen Photonics A/S

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Quick Facts
Patent No.
US 6,693,701
App. No.
09/867,036
Filed
2001-05-29
Granted
2004-02-17
Kind
B2