Granted Patent
Utility
US 6,693,939 · App. 10/141,216
Laser lithography light source with beam delivery
Inventors:
Brian Klene, Palash P. Das, Steve Grove, Alexander I. Ershov, Scot Smith, Xiaojiang Pan, Richard L. Sandstrom
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: May 7, 2002
Inventors
Brian Klene
Palash P. Das
Steve Grove
Alexander I. Ershov
Scot Smith
Xiaojiang Pan
Richard L. Sandstrom
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.