Granted Patent
Utility
US 6,694,822 · App. 09/502,406
Use of multi-layer thin films as stress sensor
Inventors:
Srinivasan K. Ganapathi, Shiva Prakash
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: Feb 10, 2000
Inventors
Srinivasan K. Ganapathi
Shiva Prakash
Assignee (at issue)
Fidelica Microsystems
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.