Granted Patent
Utility
US 6,696,005 · App. 10/145,332
Method for making a polishing pad with built-in optical sensor
Inventor:
Alan Strasbaugh
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: May 13, 2002
Inventor
Alan Strasbaugh
Assignee (at issue)
Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.