Granted Patent
Utility
US 6,696,367 · App. 10/260,821
System for the improved handling of wafers within a process tool
Inventors:
Ravinder Aggarwal, Jim Kusbel, Jim Alexander
Patented Case
View Patent ↗
Granted: Feb 24, 2004
Filed: Sep 27, 2002
Inventors
Ravinder Aggarwal
Jim Kusbel
Jim Alexander
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.