Granted Patent
Utility
US 6,699,372 · App. 09/836,365
Method of coil preparation for ionized metal plasma process and method of manufacturing integrated circuits
Inventors:
Siddhartha Bhowmik, Sailesh Mansinh Merchant, Frank Minardi
Patented Case
View Patent ↗
Granted: Mar 2, 2004
Filed: Apr 16, 2001
Inventors
Siddhartha Bhowmik
Sailesh Mansinh Merchant
Frank Minardi
Assignee (at issue)
Agere Systems Guardian Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.