Granted Patent
Utility
US 6,699,400 · App. 09/326,514
Etch process and apparatus therefor
Inventors:
Arne Ballantine, Scott A. Estes, Emily E. Fisch, Gary L. Milo, Ronald A. Warren
Patented Case
View Patent ↗
Granted: Mar 2, 2004
Filed: Jun 4, 1999
Inventors
Arne Ballantine
Scott A. Estes
Emily E. Fisch
Gary L. Milo
Ronald A. Warren
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.