Granted Patent
Utility
US 6,700,174 · App. 08/937,859
Batch fabricated semiconductor thin-film pressure sensor and method of making same
Inventors:
Denny K. Miu, Weilong Tang
Patented Case
View Patent ↗
Granted: Mar 2, 2004
Filed: Sep 25, 1997
Inventors
Denny K. Miu
Weilong Tang
Assignee (at issue)
Integrated Micromachines, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.