Granted Patent
Utility
US 6,700,644 · App. 10/163,791
Condenser for photolithography system
Inventor:
William C. Sweatt
Patented Case
View Patent ↗
Granted: Mar 2, 2004
Filed: Jun 5, 2002
Inventor
William C. Sweatt
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.