IP Library › Granted Patent US 6,701,004
Granted Patent Utility
US 6,701,004 · App. 09/470,082

Detecting defects on photomasks

Inventors: David Shykind, Chris Kenyon, Richard E. Schenker
Patented Case View Patent ↗
Granted: Mar 2, 2004 Filed: Dec 22, 1999
Inventors
David Shykind
Chris Kenyon
Richard E. Schenker
Assignee (at issue)
Intel Corporation

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Quick Facts
Patent No.
US 6,701,004
App. No.
09/470,082
Filed
1999-12-22
Granted
2004-03-02
Kind
B1