Granted Patent
Utility
US 6,701,202 · App. 10/033,443
Performance evaluation method for plasma processing apparatus
Inventors:
Akira Nakano, Tadahiro Ohmi
Patented Case
View Patent ↗
Granted: Mar 2, 2004
Filed: Nov 2, 2001
Inventors
Akira Nakano
Tadahiro Ohmi
Assignee (at issue)
ALPS ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.