Granted Patent
Utility
US 6,701,972 · App. 10/044,047
Vacuum load lock, system including vacuum load lock, and associated methods
Inventors:
Colin John Dickinson, Daimhin Paul Murphy
Patented Case
View Patent ↗
Granted: Mar 9, 2004
Filed: Jan 11, 2002
Inventors
Colin John Dickinson
Daimhin Paul Murphy
Assignee (at issue)
The BOC Group Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.