Granted Patent
Utility
US 6,703,328 · App. 10/044,987
Semiconductor device manufacturing method
Inventors:
Toshihiko Tanaka, Takashi Hattori
Patented Case
View Patent ↗
Granted: Mar 9, 2004
Filed: Jan 15, 2002
Inventors
Toshihiko Tanaka
Takashi Hattori
Assignee (at issue)
Renesas Technology Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.