IP Library Granted Patent US 6,703,613
Granted Patent Utility
US 6,703,613 · App. 09/988,339

Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method

Inventors: Kazutoshi Kaji, Takashi Aoyama, Shunroku Taya, Shigeto Isakozawa
Patented Case View Patent ↗
Granted: Mar 9, 2004 Filed: Nov 19, 2001
Inventors
Kazutoshi Kaji
Takashi Aoyama
Shunroku Taya
Shigeto Isakozawa
Assignees (at issue)
HITACHI, LTD.
Hitachi High-Technologies Corporation

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Quick Facts
Patent No.
US 6,703,613
App. No.
09/988,339
Filed
2001-11-19
Granted
2004-03-09
Kind
B2