IP Library Granted Patent US 6,703,621
Granted Patent Utility
US 6,703,621 · App. 10/051,205

Method for the optical acquisition of characteristic sizes of an illuminated sample

Inventor: Ralf Wolleschensky
Patented Case View Patent ↗
Granted: Mar 9, 2004 Filed: Jan 16, 2002
Inventor
Ralf Wolleschensky
Assignee (at issue)
Carl Zeiss Jena GmbH

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Quick Facts
Patent No.
US 6,703,621
App. No.
10/051,205
Filed
2002-01-16
Granted
2004-03-09
Kind
B2