Granted Patent
Utility
US 6,704,496 · App. 10/291,897
High temperature drop-off of a substrate
Inventors:
Paul Jacobson, Ivo Raaijmakers, Ravinder Aggarwal, Robert C. Haro
Patented Case
View Patent ↗
Granted: Mar 9, 2004
Filed: Nov 8, 2002
Inventors
Paul Jacobson
Ivo Raaijmakers
Ravinder Aggarwal
Robert C. Haro
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.