Granted Patent
Utility
US 6,705,095 · App. 10/094,500
Semiconductor process tool incorporating heat exchanger
Inventors:
Taylor N. Thompson, Jr., Sanjiv Patel
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Mar 8, 2002
Inventors
Taylor N. Thompson, Jr.
Sanjiv Patel
Assignee (at issue)
Kinetics Thermal Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.