Granted Patent
Utility
US 6,705,331 · App. 09/987,270
Substrate cleaning apparatus
Inventors:
Masanobu Sato, Sadao Hirae, Shuichi Yasuda, Kenya Morinishi
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Nov 14, 2001
Inventors
Masanobu Sato
Sadao Hirae
Shuichi Yasuda
Kenya Morinishi
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.