Granted Patent
Utility
US 6,706,142 · App. 09/997,158
Systems and methods for enhancing plasma processing of a semiconductor substrate
Inventors:
Stephen E. Savas, John Zajac, Mark Kushner, Ronald L. Kinder
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Nov 28, 2001
Inventors
Stephen E. Savas
John Zajac
Mark Kushner
Ronald L. Kinder
Assignee (at issue)
Mattson Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.