Granted Patent
Utility
US 6,706,202 · App. 09/672,386
Method for shaped optical MEMS components with stressed thin films
Inventors:
Decai Sun, Michel A. Rosa, Eric Peeters, Francesco Lemmi, Patrick Y. Maeda, Christopher L. Chua
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Sep 28, 2000
Inventors
Decai Sun
Michel A. Rosa
Eric Peeters
Francesco Lemmi
Patrick Y. Maeda
Christopher L. Chua
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.