Granted Patent
Utility
US 6,706,205 · App. 10/067,380
Semiconductor processing article
Inventors:
Thomas Bert Gorczyca, Udo Heinz Retzlaff, Stephan Popp
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Feb 7, 2002
Inventors
Thomas Bert Gorczyca
Udo Heinz Retzlaff
Stephan Popp
Assignee (at issue)
General Electric Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.