Granted Patent
Utility
US 6,706,644 · App. 10/206,427
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors
Inventors:
Jay Burnham, James S. Nakos, James J. Quinlivan, Steven M. Shank, Deborah A. Tucker, Beth Ward
Patented Case
View Patent ↗
Granted: Mar 16, 2004
Filed: Jul 26, 2002
Inventors
Jay Burnham
James S. Nakos
James J. Quinlivan
Steven M. Shank
Deborah A. Tucker
Beth Ward
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.