Granted Patent
Utility
US 6,709,267 · App. 10/331,444
Substrate holder with deep annular groove to prevent edge heat loss
Inventors:
Mark Hawkins, Matthew G. Goodman, Loren Jacobs
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Dec 27, 2002
Inventors
Mark Hawkins
Matthew G. Goodman
Loren Jacobs
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.