Granted Patent
Utility
US 6,709,556 · App. 10/364,343
Plasma processing apparatus
Inventor:
Gordon Green
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Feb 12, 2003
Inventor
Gordon Green
Assignee (at issue)
Trikon Technologies Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.