Granted Patent
Utility
US 6,709,568 · App. 10/064,125
Method for determining concentrations of additives in acid copper electrochemical deposition baths
Inventors:
Jianwen Han, Ronni M. Etterman, Peter Robertson, Richard Bhella, David M. Price
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Jun 13, 2002
Inventors
Jianwen Han
Ronni M. Etterman
Peter Robertson
Richard Bhella
David M. Price
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.