Granted Patent
Utility
US 6,709,708 · App. 09/894,655
Immersion coating system
Inventors:
Kenny-Tuan Dinh, Richard H. Nealey, John G. Matta
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Jun 28, 2001
Inventors
Kenny-Tuan Dinh
Richard H. Nealey
John G. Matta
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.