Granted Patent
Utility
US 6,709,793 · App. 10/284,836
Method of manufacturing reticles using subresolution test patterns
Inventors:
Keith Brankner, Charles F. King, Lloyd C. Litt
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Oct 31, 2002
Inventors
Keith Brankner
Charles F. King
Lloyd C. Litt
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.