Granted Patent
Utility
US 6,709,876 · App. 10/215,226
Method for detecting removal of organic material from a semiconductor device in a manufacturing process
Inventors:
Veronika Polei, Martin Welzel
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Aug 8, 2002
Inventors
Veronika Polei
Martin Welzel
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.